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Conferences > OIC > 2022 > TD > TD.9

High quality optical Indium Tin Oxide (ITO) layers deposited by Ion Beam Sputtering (IBS)

Konstantina Kostourou, Volker Scheuer, and Daniel Kopf

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Abstract

A study of the electrical properties of ITO layers combined with underlying optical interference layers and their optical properties and surface roughness.

© 2022 The Author(s)

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