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Structural Modifications in Amorphous Oxide Nanolaminates with Annealing

Samuel Yvan Castro-Lucas, Le Yang, Mariana Fazio, Ashot Markosyan, Riccardo Bassiri, Martin M. Fejer, and Carmen S. Menoni

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Abstract

Nanolaminates of TiO2/Ta2O5, SiO2/Ta2O5 and TiO2/GeO2 are investigated to assess structural modifications with annealing. Depending on the nanolaminate composition, annealing is shown to enhance cation diffusion.

© 2022 The Author(s)

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