Low Temperature Ion Beam Sputtered Optical Coatings

Th. Gischkat; D. Schachtler; F. Steger; Z. Balogh-Michels; R. Botha; B. Vetsch; T. Strüning; J. Birkhölzer; M. Michler; Ch. Mühlig; Ch. Mühlig; S. Schwinde; M. Trost; S. Schröder; A. Borzi; A. Neels

doi:10.1364/OIC.2022.ThC.6

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper ThC.6
•https://doi.org/10.1364/OIC.2022.ThC.6

Low Temperature Ion Beam Sputtered Optical Coatings

Th. Gischkat, D. Schachtler, F. Steger, Z. Balogh-Michels, R. Botha, B. Vetsch, T. Strüning, J. Birkhölzer, M. Michler, Ch. Mühlig, S. Schwinde, M. Trost, S. Schröder, A. Borzi, and A. Neels

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

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Progress in Conventional PVD (ThC)

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T. Gischkat, D. Schachtler, F. Steger, Z. Balogh-Michels, R. Botha, B. Vetsch, T. Strüning, J. Birkhölzer, M. Michler, C. Mühlig, S. Schwinde, M. Trost, S. Schröder, A. Borzi, and A. Neels, "Low Temperature Ion Beam Sputtered Optical Coatings," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper ThC.6.

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Abstract

The effect of low temperature ion beam sputtering on thin film properties was investigated. The SiO₂ and Ta₂O₅ films grown at 0°C show a trend of lower optical losses and higher LIDT compared to 100°C.

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