Microwave Plasma Assisted Magnetron Sputtering of Infrared Multilayer Thin Film Bandpass Filters for application in non-dispersive infrared gas sensors

Jonathan Pomfret; Jonathan Pomfret; Des Gibson; Des Gibson; Lewis Fleming; Lewis Fleming; Shigeng Song; Shigeng Song; Greg McGann; Greg McGann; Sam Ahmadzadeh; Peter Mackay

doi:10.1364/OIC.2022.ThC.7

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper ThC.7
•https://doi.org/10.1364/OIC.2022.ThC.7

Microwave Plasma Assisted Magnetron Sputtering of Infrared Multilayer Thin Film Bandpass Filters for application in non-dispersive infrared gas sensors

Jonathan Pomfret, Des Gibson, Lewis Fleming, Shigeng Song, Greg McGann, Sam Ahmadzadeh, and Peter Mackay

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

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Progress in Conventional PVD (ThC)

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J. Pomfret, D. Gibson, L. Fleming, S. Song, G. McGann, S. Ahmadzadeh, and P. Mackay, "Microwave Plasma Assisted Magnetron Sputtering of Infrared Multilayer Thin Film Bandpass Filters for application in non-dispersive infrared gas sensors," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper ThC.7.

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Abstract

Infrared bandpass filters deposited using microwave plasma assisted pulsed DC magnetron sputtering are described. Thermo-optical and spectral properties across a range of environmental conditions suitable for use in NDIR gas sensors are demonstrated.

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