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Process Refinements in Optical Coatings for UV Applications Using Ion Beam Sputtering

David Howe, Matthias Falmbigl, Jason George, Kyle Godin, and Binyamin Rubin

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Abstract

We investigate how target selection, ion beam parameters, and post-deposition annealing can affect UV performance of ion beam sputtered optical coatings. We combine these considerations to produce high performance HR mirrors at 355 nm.

© 2022 The Author(s)

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