Basic Research of Monomaterial Multi-layer Coatings Deposited by Sputtering and Electron Beam Evaporation

Naoya Tajima; Hiroshi Murotani; Takayuki Matsudaira

doi:10.1364/OIC.2022.WD.6

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper WD.6
•https://doi.org/10.1364/OIC.2022.WD.6

Basic Research of Monomaterial Multi-layer Coatings Deposited by Sputtering and Electron Beam Evaporation

Naoya Tajima, Hiroshi Murotani, and Takayuki Matsudaira

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

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Deposition Technology Research for Non-Conventional Properties of Optical Coatings (WD)

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N. Tajima, H. Murotani, and T. Matsudaira, "Basic Research of Monomaterial Multi-layer Coatings Deposited by Sputtering and Electron Beam Evaporation," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper WD.6.

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Abstract

SiO₂ monomaterial two-layer coatings composed of the same deposition material as the substrate were fabricated with combination deposition equipment by simultaneous deposition followed by sputtering or EB evaporation.

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