A Comparison of Encoding Schemes for E-beam Fabrication of Computer Generated Holograms

H. Farhoosh; M. R. Feldman; S. H. Lee; C. C. Guest; Y. Fainman

doi:10.1364/OPTCOMP.1987.MC6

Topical Meeting on Optical Computing
Technical Digest Series (Optica Publishing Group, 1987),
paper MC6
•https://doi.org/10.1364/OPTCOMP.1987.MC6

A Comparison of Encoding Schemes for E-beam Fabrication of Computer Generated Holograms

H. Farhoosh, M. R. Feldman, S. H. Lee, C. C. Guest, and Y. Fainman

Optical Computing 1987

Incline Village, Nevada United States
16–18 March 1987
ISBN:

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Session 3 (MC)

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H. Farhoosh, M. R. Feldman, S. H. Lee, C. C. Guest, and Y. Fainman, "A Comparison of Encoding Schemes for E-beam Fabrication of Computer Generated Holograms," in Topical Meeting on Optical Computing, Technical Digest Series (Optica Publishing Group, 1987), paper MC6.

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Abstract

Motivated by many attractive features and capabilities of electron beam lithography systems, which include large space band-width product (SBWP), direct writing at submicron resolution, and small distortion errors, we carried out an investigation on the suitability of various encoding methods of computer generated holograms (CGH) for e-beam fabrication.

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