Abstract

Electron probe techniques for the high speed testing of Integrated Circuits have considerably higher spatial resolution compared to optical techniques but have tended to suffer from poorer temporal resolution. In this presentation we describe a novel type of instrument that combines the advantages of conventional SEM voltage contrast techniques(1) (including a spatial resolution better than 0.1μm and beam steerability) with an order of magnitude improvement in temporal resolution.

© 1987 Optical Society of America