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Templated Liquid-Phase Epitaxy of InP Structures on Si

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Abstract

We demonstrate direct and over-dielectric heteroepitaxial growth of InP on Si substrates through templated liquid-phase epitaxy. Large grains (¿5 µm) are indicated by electron channeling contrast imaging and epitaxy is confirmed by x-ray diffraction.

© 2021 The Author(s)

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