Abstract

detail studies of x-ray multilayer microstructures and stability are essential to a complete understanding of these nano-scali metastable materials, and may lead to synthesis of multilayers of improved performance. The microstructures and phases inside the layers depend upon the period, and show different behaviors for different materials systems.^1,2 Their response to thermal treatment likewise depends on the materials combinations and the period. In this project, the microstructures and their thermal stability of various period W/C, WC/C, Ru/C and Ru/B₄C multilayers are investigated by High-Resolution Transmission Electron Microscopy (HRTEM) and x-ray diffraction.

© 1992 Optical Society of America