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Conferences > PXRAYMS > 1992 > TuB > TuB1

High Resolution Electron Microscope Imaging and Quantification of Interface Structure in X-Ray Multilayers

R. Hull, D.L. Windt, R. Kola, and W.K. Waskiewicz

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Abstract

We discuss the applications and limits of high resolution electron microscopy (HREM) to quantifying atomic-scale structure in X-Ray mirror multilayer (XMM) structures. It is shown how detailed processing of HREM images can yield quantitative measurements of interface planarity and diffuseness, which are critical parameters in determining the reflectivity of XMM structures.

© 1992 Optical Society of America

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