Imaging X-Ray Multilayer Structures with Cross-Sectional HREM

Y. Cheng; M.B. Stearns; D.J. Smith; D.G. Stearns

doi:10.1364/PXRAYMS.1992.PD5

Physics of X-Ray Multilayer Structures
Technical Digest Series (Optica Publishing Group, 1992),
paper PD5
•https://doi.org/10.1364/PXRAYMS.1992.PD5

Imaging X-Ray Multilayer Structures with Cross-Sectional HREM

Y. Cheng, M.B. Stearns, D.J. Smith, and D.G. Stearns

Physics of X-Ray Multilayer Structures 1992

Jackson Hole, Wyoming United States
2–5 March 1992
ISBN:

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Y. Cheng, M. B. Stearns, D. J. Smith, and D. G. Stearns, "Imaging X-Ray Multilayer Structures with Cross-Sectional HREM," in Physics of X-Ray Multilayer Structures, Technical Digest Series (Optica Publishing Group, 1992), paper PD5.

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Abstract

High-resolution electron microscopy (HREM), with a resolution below 2Å, is the best tool for observing the actual detailed structure for ML. This gives direct atomic scale information about the film structure, including the bilayer thickness, the crystalline structure and the roughness of the individual layers and the interlayers.

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