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Conferences > PXRAYMS > 1994 > TuC > TuC.4

X-Ray Investigations of Supersmooth Surfaces, Near Surface Layers and Thin Films

I. V. Kozhevnikov, B. M. Alaudinov, A. I. Artyukov, V. E. Asadchikov, I. N. Bukreeva, A. Yu. Karabekov, and A. V. Vinogradov

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Abstract

The potentialities, advantages, and perspectives of X-ray methods are considered for quantitative testing and examination of supersmooth substrates, near-surface transition layers of solids and thin films. The methods are based on analysis of X-ray scattering diagram and allow one to determine the power spectral density (PSD) of surface microroughness without a priori assumptions about the form of the correlation function of roughness heights or their probability density function.

© 1994 Optical Society of America

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