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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper PTuB3

Advanced Laser Annealing Technology in FPD Industries

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The next generation excimer and DPSS laser annealing technology applied to low-temperature poly-SiTFT process is reviewed from a standpoint of the future trend of FPD industries, especially focusing on the DPSS lasers.

© 2004 Optical Society of America

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