Abstract

The deformable mirror device (DMD) light modulator is a monolithic silicon integrated device that operates by the electro-static deflection of miniature mirror elements.¹ There are a variety of different mirror element structures and array sizes currently under development for different light modulating applications. For optical image processing applications, a pixel structure capable of phase modulation is of particular interest. A phase modulator can be used in the Fourier plane of a coherent optical system to implement phase-flattening filters for image correlation or other operations where manipulation of Fourier transform phase is required.

© 1988 Optical Society of America