Abstract

The Deformable Mirror Device (DMD) is a micromechanical spatial light modulator that offers both amplitude and/or phase modulation. It is comprised of small mirror elements suspended above silicon addressing circuitry by small hinges attached to support posts. [Ref. ¹] The pixel can be made to rotate about its hinge axis by applying a potential difference between the pixel and the addressing electrode. Both area array and linear DMDs have been built and found application in several areas. [Ref. ^{2, 3, 4}]

© 1990 Optical Society of America