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Bistable Deformable Mirror Device

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Abstract

The bistable DMD is the digital version of a class of reflective, micromechanical spatial light modulators (SLMs) known as deformable mirror devices (DMDs). In its earliest form the DMD was a hybrid SLM consisting of a metalized polymer mirror bonded to an underlying silicon address circuit[1,2].

© 1988 Optical Society of America

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