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Conferences > SLMA > 1993 > STuB > STuB.3

Hybrid Silicon/gallium Arsenide Inverted Fabry-Perot Cavity MQW Spatial Light Modulators

Armand R. Tanguay, Anupam Madhukar, and B. Keith Jenkins

Open Access Open Access

Abstract

High bandwidth (>10 MHz) smart pixel SLMs based on the hybrid integration of silicon based detection and control electronics with gallium-arsenide-based MQW modulators by flip chip bonding are described.

© 1993 Optical Society of America

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