Abstract

Scattering due to optical surface imperfections manifests itself very differently in infra red, visible, extreme ultra violet, and X-ray systems. (In this context, we are limiting ourselves to relatively small angle scattering on the order of arc seconds or minutes, as opposed to wider angle stray light.) The differences are due not only to the very different radiation wavelengths, but also to the very different geometries required of the optical systems. For example, infra red and visible systems use conventional, near normal incidence optical surfaces, while X-ray systems use grazing incidence, near cylindrical surfaces. Extreme ultra violet systems can use surfaces which fit neither of these descriptions very well, and which have quickly changing curvatures and incidence angles.

© 1988 Optical Society of America