Progressive Mechanical and Chemical Polishing

Toshio Kasai; Akira Kobayashi

doi:10.1364/SOP.1984.TuBB4

Topical Meeting on the Science of Polishing
Technical Digest Series (Optica Publishing Group, 1984),
paper TuBB4
•https://doi.org/10.1364/SOP.1984.TuBB4

Progressive Mechanical and Chemical Polishing

Toshio Kasai and Akira Kobayashi

Science of Polishing 1984

Monterey, California United States
17–17 April 1984
ISBN:

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Session II (TuBB)

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T. Kasai and A. Kobayashi, "Progressive Mechanical and Chemical Polishing," in Topical Meeting on the Science of Polishing, Technical Digest Series (Optica Publishing Group, 1984), paper TuBB4.

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Abstract

The reproducible preparation of mirror-like, damage-free and optically flat surfaces is crucial to the fabrication of high performance semiconductor or optical devices. Therefore, various polishing methods have been proposed and successed for finishing a brittle or a metallic material surface.

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