Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Specification of surface finish in terms of system performance

Not Accessible

Your library or personal account may give you access

Abstract

The man-or-woman in the street model of optical surface quality involves two features -- 'figure', which behaves according to geometrical optics, and 'finish', which is treated by diffraction optics.

© 1992 Optical Society of America

PDF Article
More Like This
Specification of the Figure and Finish of EUV Mirrors in Terms of Performance Requirements

E. L. Church and P. Z. Takacs
EOS.77 Extreme Ultraviolet Lithography (EUL) 1994

Integrating Figure and Finish Measurements with Surface Profiling Instruments

Peter Z. Takacs and Eugene L. Church
STuB3 Surface Roughness and Scattering (SURS) 1992

Nonspecular Scattering in EUV Lithography: Determining Specifications for Surface Finish

D. G. Stearns, D. P. Gaines, B. LaFontaine, G. E. Sommargren, D. W. Sweeney, D. R. Kania, and N. M. Ceglio
RMC167 Extreme Ultraviolet Lithography (EUL) 1996

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.