Abstract

We have made absolute diffraction efficiency measurements of free standing x-ray transmission gratings. The grating periods are 2000 Å and 3000 Å with a nominal line-to-space ratio of 1:1 and thickness from 4000 Å to 6000 Å. Although theoretical calculations of ideal grating performance are well established, actual physical parameters of these microstructures are not readily accessible. Accurate calibration of actual performance is critically needed to allow unfolding of multi-component x-ray spectral data as the various dispersion orders overlap.

© 1986 Optical Society of America