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Conferences > SXRAY > 1993 > TuD > TuD.15

Computational Simulations of a Soft X-Ray Projection Lithography Laser Plasma Source

R. E. Olson, W. C. Sweatt, and P. D. Rockett

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Abstract

A Sandia National Laboratories / AT&T Bell Laboratories team is developing a soft x-ray projection lithography tool that uses a compact laser plasma as a source of 14 nm x-rays. Optimization of the 14 nm x-ray source brightness is a key issue in this research. This paper describes our understanding of the source as it has been obtained through the use of computer simulations utilizing the LASNEX radiation-hydrodynamics code.

© 1993 Optical Society of America

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