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Conferences > SXRAY > 1993 > TuD > TuD.9

Manufacture and Characterization of Holographic Diffraction Gratings for Soft X-Rays

Alexander Irtel von Brenndorff

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Abstract

In this paper, a manufacturing process for laminar gratings is described and the effects of variations of this process on the surface roughness are studied using a STM.

© 1993 Optical Society of America

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