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Conferences > SXRAY > 1993 > WA > WA.7

Soft X-Ray Generation by a Table-Top High-Repetitive Glass Laser

H. Aritome, K. Haramura, H. Sekiguchi, H. Hara, and T. Mochizuki

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Abstract

Soft x-rays generated from a laser produced plasma are of interest as a source for an x-ray microscope and also for x-ray lithography. In this paper, the x-ray generation from a recently developed, table-top high repetitive, high energy moving glass slab laser1) is demonstrated. The laser system can be operated at 5 Hz with laser pulse energy of 6 J. The size of the system is expected to be 3.4 m × 1.2 m × 1.3 m except for the power supply and the cooling unit.

© 1993 Optical Society of America

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