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Conferences > SXRAY > 1993 > WA > WA.8

A Compact Synchrotron and Condenser for Soft-X-Ray Projection Lithography

D. L. White, A. A. MacDowell, J. B. Murphy, and O. R. Wood

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Abstract

A compact 600 MeV synchrotron has been designed specifically for soft-x-ray projection lithography (SXPL). The storage ring has been optimized to produce copious amounts of radiation in the 13 nm wavelength region at a minimal price, e.g., using conventional warm electromagnets and a high current but low brightness electron beam. Since synchrotron design is a mature field, it should be possible to build such a ring without further research.1

© 1993 Optical Society of America

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