Optical Subwavelength-Scale Displacement Sensing with Dynamically Controllable Characteristics

Erdal Bulgan

doi:10.1364/SENSORS.2010.SWD5

Advanced Photonics & Renewable Energy
OSA Technical Digest (CD) (Optica Publishing Group, 2010),
paper SWD5
•https://doi.org/10.1364/SENSORS.2010.SWD5

Optical Subwavelength-Scale Displacement Sensing with Dynamically Controllable Characteristics

Erdal Bulgan

Optical Sensors 2010

Karlsruhe Germany
21–24 June 2010
ISBN: 978-1-55752-896-4

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Sensor Systems II (SWD)

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E. Bulgan, "Optical Subwavelength-Scale Displacement Sensing with Dynamically Controllable Characteristics," in Advanced Photonics & Renewable Energy, OSA Technical Digest (CD) (Optica Publishing Group, 2010), paper SWD5.

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Abstract

Silicon photonic devices with embedded MEMS have significantly been studied. Precise characterization and operation of such devices in the nano/micro-system level is critical. A novel optical sensing technique for subwavelength-scale displacement measurements with dynamically controllable characteristics is introduced.

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