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Conferences > Sensors > 2023 > SM2D > SM2D.5

Near-Infrared Sensitive Plasmonic FET

Yushan Meng, Paul Beckett, Dechuan Sun, and Ranjith Rajasekharan Unnithan

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Abstract

We demonstrate both simulation and fabrication results for a plasmonic enhanced back-gated FET with a gold nano-grating over a silicon channel, operating at near infrared wavelengths.

© 2023 The Author(s)

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