Abstract

We report the generation of quasi-cw vacuum ultraviolet (VUV) light at 160 nm with a repetition rate of 82 MHz by two second-harmonic generations and one sum frequency mixing. The VUV laser light is produced as a fifth-harmonic generation of a mode-locked ps Ti:sapphire laser system by successive stages with nonlinear crystals of LBO and KBBF. A stable generation of laser light at 200 nm for more than 6 h is the most important step for obtaining the generation of light at a wavelength of 160 nm.

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