Abstract

A toroidal relay optic has been used to overcome the problem of damage caused by debris that has limited previous attempts at soft x-ray lithography and contact microscopy using laser-produced plasma sources. Not only is the specimen preserved, but it is now possible to have a vacuum retaining soft x-ray transparent Si₃N₄ window as a permanent part of the apparatus, greatly simplifying specimen handling. The exposure times are ∼2 ns.

© 1987 Optical Society of America

Soft x-ray lithography using radiation from laser-produced plasmas

P. Gohil, H. Kapoor, D. Ma, M. C. Pekerar, T. J. Mcllrath, and M. L. Ginter
Appl. Opt. 24(13) 2024-2027 (1985)

Soft x-ray radiation from laser-produced plasmas: characterization of radiation emission and its use in x-ray lithography

Michael Kühne and Hans-Christian Petzold
Appl. Opt. 27(18) 3926-3932 (1988)

Characterization and control of laser plasma flux parameters for soft-x-ray projection lithography

Martin Richardson, William T. Silfvast, Howard A. Bender, Art Hanzo, Victor P. Yanovsky, Feng Jin, and Jerry Thorpe
Appl. Opt. 32(34) 6901-6910 (1993)

Prototype high-speed tape target transport for a laser plasma soft-x-ray projection lithography source

Steven J. Haney, Kurt W. Berger, Glenn D. Kubiak, Paul D. Rockett, and John Hunter
Appl. Opt. 32(34) 6934-6937 (1993)

Table-top soft x-ray microscope using laser-induced plasma from a pulsed gas jet

Matthias Müller, Tobias Mey, Jürgen Niemeyer, and Klaus Mann
Opt. Express 22(19) 23489-23495 (2014)