Abstract
Fabrication details of air-bridged Kerr nonlinear polymer photonic crystal slab
structures are presented. Both the two-dimensional photonic crystal slab and the one-dimensional
nanobeam structures are fabricated using direct focused ion beam etching and subsequent wet chemical
etching. The scanning electron microscopy images show the uniformity and homogeneity of the
cylindrical air holes. The optical measurement in the near-infrared region is implemented using the
tapered fiber coupling method, and the results agree with the numerical calculations by using the
three-dimensional finite-difference time-domain method.
© 2012 Chinese Optics Letters
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