Abstract
A modified extended-ptychographical-iterative-engine (ePIE) algorithm is proposed to overcome the
disadvantages of ePIE technique and reduce the influence of stage hysteresis or backlash error. The exit wave
of a rotatable "screen" illuminated by plane wave is used as the illumination on the specimen, and the complex
transmission functions of the rotatable object and specimen can be simultaneously reconstructed. Compared with
the standard x-y scanning PIE algorithm, the proposed algorithm can completely avoid the influence of stage
hysteresis (or backlash error). The proposed algorithm also has higher convergence speed and better accuracy
than the standard PIE algorithm.
© 2014 Chinese Optics Letters
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