Abstract

We report on the fabrication and optimization of lithium niobate planar and ridge waveguides at the wavelength of 633 nm. To obtain a planar waveguide, oxygen ions with an energy of 3.0 MeV and a fluence of 1.5×10¹⁵  ions/cm² are implanted in the polished face of LiNbO₃ crystals. For planar waveguides, a loss of 0.5 dB/cm is obtained after annealing at 300°C for 30 min. The ridge waveguide is fabricated by the diamond blade dicing method on optimized planar waveguides. The guiding properties are investigated by prism coupling and end-face coupling methods.

© 2021 Chinese Laser Press

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