Abstract

Micromachining based on femtosecond lasers usually requires accurate control of the sample movement, which may be very complex and costly. Therefore, the exploration of micromachining without sample movement is valuable. Herein, we have illustrated the manipulation of optical fields by controlling the polarization or phase to vary periodically and then realized certain focal traces by real-time loading of the computer-generated holograms (CGHs) on the spatial light modulator. The focal trace is composed of many discrete focal spots, which are generated experimentally by using the real-time dynamically controlled CGHs. With the designed focal traces, various microstructures such as an ellipse, a Chinese character “Nan”, and an irregular quadrilateral grid structure are fabricated in the z-cut LiNbO₃ wafers, showing good qualities in terms of continuity and homogeneity. Our method proposes a movement free solution for micromachining samples and completely abandons the high precision stage and complex movement control, making microstructure fabrication more flexible, stable, and cheaper.

© 2022 Chinese Laser Press

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