Abstract
SrMoO3 (SMO) thin films are deposited on LaAlO3 substrates by magnetron sputtering. The effects of ambient temperature on the structural, electrical, and optical properties of the films are investigated. As the temperature increases from 23°C to 800°C, the SMO film exhibits high crystallinity and low electrical resistivity, and the real part of dielectric functions becomes less negative in the visible and near-IR wavelength range, and the epsilon near zero (ENZ) wavelength increases from 460 nm to 890 nm. The optical loss of the SMO film is significantly lower than that of Au, and its plasmonic performance is comparable to or even higher than TiN in the temperature range of 23°C to 600°C. These studies are critical for the design of high-temperature SMO-based plasmonic devices.
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