Abstract

All-dielectric metasurfaces are usually limited because of their static functionality and small scale. In this paper, we use an easy nanofabrication technique to fabricate all-dielectric metasurfaces with the advantages of having dynamic tunability and a large area. Using an anodized aluminum oxide (AAO) template as an evaporation mask, a large-area metasurface embedded in polydimethylsiloxane (PDMS) (>2 cm²) is fabricated. The metasurface exhibits remarkable electric dipole (ED) and magnetic dipole (MD) resonances. Based on the solvent-swelling effect of PDMS in 20% toluene, the ED/MD resonance peak shifts dynamically ∼40 nm to red. So far, to the best of our knowledge, a large-area metasurface embedded in PDMS and achieved by using the AAO template method has not appeared.

© 2023 Chinese Laser Press

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