Abstract

In this paper, a multifunctional ultraviolet-C (UVC) micro-LED with monolithically integrated photodetector (PD) based on AlGaN multiple quantum wells (MQWs) was fabricated. We designed and integrated UVC LED with sizes of 40 and 300 $\mu$ m emitted at 277 nm on a single chip which also serve functions as PDs and further studied the performance of on-chip real-time photodetection. The photocurrent generated from one LED can well reflect the light output power of the adjacent LED. Furthermore, both 40 $\mu$ m UVC micro-LED and 300 $\mu$ m UVC LED play important roles in high speed UVC communication with record bandwidths of 497.58 MHz for 40 $\mu$ m micro-LED and 467.38 MHz for 300 $\mu$ m LED, offering each other as backup light source in high speed UVC communication. And the data transmission rates of 1.6 Gbps for 40 $\mu$ m micro-LED and 1.21 Gbps for 300 $\mu$ m LED over 1 m link based on the 16-ary quadrature amplitude modulation orthogonal frequency division multiplexing (16-QAM-OFDM) with pre-equalization were achieved. The multifunctional UVC micro-LED monolithically integrated PD, without the need for an external PD to monitor the fluctuations in the luminescence, providing high stability for diverse applications, such as spatial wireless communication for 6 G communication.

2 Gbps free-space ultraviolet-C communication based on a high-bandwidth micro-LED achieved with pre-equalization

Shijie Zhu, Pengjiang Qiu, Zeyuan Qian, Xinyi Shan, Zhou Wang, Ke Jiang, Xiaojuan Sun, Xugao Cui, Guoqi Zhang, Dabing Li, and Pengfei Tian
Opt. Lett. 46(9) 2147-2150 (2021)

Hundred-meter Gb/s deep ultraviolet wireless communications using AlGaN micro-LEDs

Daniel M. Maclure, Cheng Chen, Jonathan J. D. McKendry, Enyuan Xie, Jordan Hill, Johannes Herrnsdorf, Erdan Gu, Harald Haas, and Martin D. Dawson
Opt. Express 30(26) 46811-46821 (2022)

High-speed underwater optical wireless communication using a blue GaN-based micro-LED

Pengfei Tian, Xiaoyan Liu, Suyu Yi, Yuxin Huang, Shuailong Zhang, Xiaolin Zhou, Laigui Hu, Lirong Zheng, and Ran Liu
Opt. Express 25(2) 1193-1201 (2017)

Full-duplex high-speed indoor optical wireless communication system based on a micro-LED and VCSEL array

Zixian Wei, Shi Zhang, Simei Mao, Lei Wang, Li Zhang, Chien-Ju Chen, Meng-Chyi Wu, Yuhan Dong, Lai Wang, Yi Luo, and H. Y. Fu
Opt. Express 29(3) 3891-3903 (2021)

Si-substrate vertical-structure InGaN/GaN micro-LED-based photodetector for beyond 10  Gbps visible light communication

Jianyang Shi, Zengyi Xu, Wenqing Niu, Dong Li, Xiaoming Wu, Ziwei Li, Junwen Zhang, Chao Shen, Guangxu Wang, Xiaolan Wang, Jianli Zhang, Fengyi Jiang, Shaohua Yu, and Nan Chi
Photon. Res. 10(10) 2394-2404 (2022)