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Doppler optical coherence tomography with a micro-electro-mechanical membrane mirror for high-speed dynamic focus tracking

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Abstract

An elliptical microelectromechanical system (MEMS) membrane mirror is electrostatically actuated to dynamically adjust the optical beam focus and track the axial scanning of the coherence gate in a Doppler optical coherence tomography (DOCT) system at 8kHz. The MEMS mirror is designed to maintain a constant numerical aperture of 0.13 and a spot size of 6.7μm over an imaging depth of 1mm in water, which improves imaging performance in resolving microspheres in gel samples and Doppler shift estimation precision in a flow phantom. The mirror’s small size (1.4mm×1mm) will allow integration with endoscopic MEMS-DOCT for in vivo applications.

© 2006 Optical Society of America

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