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Post-fabrication tuning of microring resonators using 3D-printed microfluidics

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Abstract

We demonstrate a method of tuning the resonant frequencies of silicon microring resonators using a 3D-printed microfluidic chip overlaid directly on the photonic circuit with zero energy consumption following the initial tuning. Aqueous solutions with different concentrations of NaCl are used in experimentation. A shift of a full free spectral range is observed at a concentration of 10% NaCl. On a 60 µm microring resonator, this equals a resonant wavelength shift of 1.514 nm when the index of the cladding changes by 0.017 refractive index units (RIUs), or at a rate of 89.05 nm/RIU.

© 2021 Optical Society of America

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Supplementary Material (1)

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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