Abstract

We have investigated the ultraviolet and visible chemiluminescence accompanying the etching of silicon by XeF₂ and atomic fluorine. The spectra obtained exhibit many similarities, but also have differences. The chemiluminescence spectrum generated by etching with atomic fluorine has one broad, unresolvable peak spanning wavelengths from 210 to 800 nm. The chemiluminescence spectrum generated by etching with XeF₂ has three bands. One band from 215 to 280 nm is presently unassigned. A second band is sharp and intense, and centered at 354 nm. We identify this band as arising from the XeF (B → X) emission. The third band arising from the reaction of XeF₂ with silicon is a broad continuum similar to that arising from the atomic fluorine reaction, which has been suggested to come from the excited SiF₃*.

© 1987 Optical Society of America