Abstract

Uncertainties in the optical constants and finite errors in the thicknesses of the layers due to shortcomings of the deposition and monitoring processes lead to a divergence between the expected and measured performances of optical multi-layer coatings. One way to reduce the effect of errors is to use a continuous evaluation and reoptimization process for the control of the deposition process.^1,2 Another is to find designs whose performances are less sensitive to the experimental errors.^3,4 The performances of de-sensitized multilayer systems are invariably worse than those of the optimum solutions. However, the chances of satisfactory deposition runs with such systems are significantly increased.

© 1992 Optical Society of America