Light Scattering by Sub-Half Micron Spherical Particles on Silicon and Oxide/Silicon Surfaces*

E. J. Bawolek; E. D. Hirleman

doi:10.1364/SURS.1992.PD3

Surface Roughness and Scattering
Technical Digest Series (Optica Publishing Group, 1992),
paper PD3
•https://doi.org/10.1364/SURS.1992.PD3

Light Scattering by Sub-Half Micron Spherical Particles on Silicon and Oxide/Silicon Surfaces^*

E. J. Bawolek and E. D. Hirleman

Surface Roughness and Scattering 1992

Tucson, Arizona United States
1–3 June 1992
ISBN:

From the session
Postdeadline Papers (PD)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
E. J. Bawolek and E. D. Hirleman, "Light Scattering by Sub-Half Micron Spherical Particles on Silicon and Oxide/Silicon Surfaces*," in Surface Roughness and Scattering, Technical Digest Series (Optica Publishing Group, 1992), paper PD3.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

We report angle resolved light scattering characteristics of individual polystyrene spheres on silicon and on a 91.5 nm thick film of oxide on silicon. Scattering was measured as a function of polarization using a He-Ne laser at a 45 degree incident angle.

PDF Article

More Like This

Oxidation Stacking Faults (OSFs) in Silicon Crystals Detected by Light Scattering Topography

Takao Abe, Hiroshi Takeno, Satoshi Ushio, and Kunio Iba
SMC3 Surface Roughness and Scattering (SURS) 1992

Light Scatter from Polysilicon Surfaces and Comparison with Surface Roughness Statistics by AFM*

E. J. Bawolek, James B. Mohr, E. D. Hirleman, and A. Majumdar
PD2 Surface Roughness and Scattering (SURS) 1992

Study of light scattering by spherical particles on various substrates

Harry Gao, Carl E. A. Johnson, and Sergey V. Broude
FX6 OSA Annual Meeting (FIO) 1991

Previous Article Next Article