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Conferences > CLEO_AT > 2023 > AM3M > AM3M.6

Scalable on-chip lasers grown on 300 mm Si wafers

Chen Shang, Kaiyin Feng, Eamonn T. Hughes, Andrew Clark, Mukul Debnath, Rosalyn Koscica, Gerald Leake, Joshua Herman, David Harame, Peter Ludewig, Yating Wan, and John E. Bowers

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Abstract

We report the first electrically pumped InAs quantum-dot lasers grown on Si within narrow oxide pockets for monolithic on-chip light sources. High performance devices are achieved at 300 mm wafer scale with high yields.

© 2023 The Author(s)

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