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Conferences > CLEO_AT > 2023 > AM3R > AM3R.4

Ultrafast Nanofabrication of Large-scale Indium Tin Oxide (ITO) Optical Devices

Ouyang Wenqi, Manshi Wang, and Shih-Chi Chen

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Abstract

The ITO film patterning rate is largely limited by traditional single-point scanning. In this work, we used a DMD-based multi-focus nanofabrication system, which realized high-speed flexible large-scale ITO surface patterning to manufacture optical devices.

© 2023 The Author(s)

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