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Conferences > CLEO_Europe > 1994 > CMG > CMG5

Modification of ceramic surfaces by excimer laser processing

W. Becker, J. Hutfless, and M. Geiger

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Abstract

Over the last few years a lot of work has been published on structuring all kinds of polymers and ceramics by excimer laser radiation.1,2,3 But excimer laser radiation can also be used to modify ceramic surfaces, e.g., to reduce the surface roughness of various engineering ceramics.4 This method is a new, versatile, and efficient alternative to conventional ways of surface finishing of ceramics with expensive diamond tools.

© 1994 IEEE

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