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Fabrication of long wavelength microresonators

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Abstract

Spontaneous emission is modified by the presence of an optical cavity. With increasing cavity finesse the fraction of spontaneous emission coupled to the lasing mode can be increased.1 While longer wavelengths (-1.5 μm) place less stringent requirements on device processing with regard to dimensional control there is no practical semiconductor mirror lattice matched to InP as there is for GaAs. With a hybrid approach, useful reflectivity (>95%) may be obtained using metal mirrors (Au, Ag), combination of dielectrics (Si, SiO2, Si3N4) or AlAs/GaAs multilayers. We have used epitaxial liftoff of InGaAs/InP quantum well structures and combined the epilayer with these mirror materials and fabricated high finesse microcavities. The application is towards optically pumped surface emitting devices.

© 1994 IEEE

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