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Conferences > CLEO_Europe > 1996 > CFE > CFE3

Parametric Study of C-N Film Deposition By Reactive Laser Ablation

A. Luches, M. Martino, A. Perrone, R. Alexandrescu, I.N. Mihailescu, and P. Mengucci

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Abstract

The interest about carbon films has recently increased because of the deposition of diamond films and the prediction of the existence of a covalently bound C-N solid with characteristics comparable or better than those of diamond [1]. Reactive laser ablation could represent the simplest technique for carbon nitride synthesis and deposition.

© 1996 IEEE

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