Abstract

Close to metallic electrical conductivity, yet still high transmittance in the visible and near-IR render tin oxide films indispensable in many important applications [1]. One of the technological issues to be resolved before successful device fabrication is the efficient and controlled patterning of these films. SnO_x films are physically and chemically resistant and adhere well to various substrates and so their patterning is not a straightforward matter. Here we report a novel technique for two dimensional tin oxide patterning by localized laser deposition from the traditional precursor of spray pyrolysis [2, 3 and Refs, therein].

© 1996 IEEE