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Conferences > CLEO_SI > 2023 > STu3O > STu3O.1

A High-Resolution Photonic Integrated High Q Microresonator Based Accelerometer

Hao Tian, Arslan S. Raja, Alaina G. Attanasio, Junqiu Liu, Rui N. Wang, Anat Siddharth, Tobias J. Kippenberg, and Sunil A. Bhave

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Abstract

We demonstrated a packaged optomechanical accelerometer with resolution of 850ng. The resonance of a 4 million Q Si3N4 microring resonator is modulated by the stress in springs of a released milligram proof mass upon acceleration.

© 2023 The Author(s)

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