Abstract

Local and global crystal orientation of various diamond films have been determined by the use of polarized Raman spectra. We present a method for the determination of local (single) crystal orientation on a diamond film within an accuracy of 1.5°. Further, the preferred crystal orientation and the crystal orientation distribution of polycrystalline diamond films have been measured using polarized Raman spectra. In particular, the distribution of the crystal orientation of two different films are presented. The accuracy of this method is approximately 5° for the (100) preferred crystal orientation.

© 1995 Optical Society of America